M. Renaud, T. Sterken, A. Schmitz, P. Fiorini, C. Hoof, R. Puers
{"title":"压电收割机和MEMS技术:制造、建模和测量","authors":"M. Renaud, T. Sterken, A. Schmitz, P. Fiorini, C. Hoof, R. Puers","doi":"10.1109/SENSOR.2007.4300274","DOIUrl":null,"url":null,"abstract":"Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 muW has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"18 10 1","pages":"891-894"},"PeriodicalIF":0.0000,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"73","resultStr":"{\"title\":\"Piezoelectric Harvesters and MEMS Technology: Fabrication, Modeling and Measurements\",\"authors\":\"M. Renaud, T. Sterken, A. Schmitz, P. Fiorini, C. Hoof, R. Puers\",\"doi\":\"10.1109/SENSOR.2007.4300274\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 muW has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.\",\"PeriodicalId\":23295,\"journal\":{\"name\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"volume\":\"18 10 1\",\"pages\":\"891-894\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-06-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"73\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2007.4300274\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2007.4300274","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Piezoelectric Harvesters and MEMS Technology: Fabrication, Modeling and Measurements
Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 muW has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.
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