溶胶前驱体中加入聚乙二醇制备钛酸锶钡薄膜的微观结构和性能

Yanhua Fan, Shuhui Yu, R. Sun, Lei Li, Mian Huang, Yan-sheng Yin, L. Wan
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引用次数: 3

摘要

采用溶胶-凝胶法制备了Ba0.7Sr0.3TiO3薄膜。薄膜是在几乎惰性的气氛中处理的,这样可以避免衬底氧化,同时允许钙钛矿相结晶。采用分子量为200的聚乙二醇(PEG)对BST前驱体溶液进行改性。研究了聚乙二醇对BST薄膜微观结构和介电性能的影响。报道了用聚乙二醇改性的溶胶制备的BST薄膜的泄漏电流。
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Microstructure and properties of barium strontium titanate thin films prepared on copper foils via addition of PEG to the sol precursor
Ba0.7Sr0.3TiO3 thin films have been deposited on copper foils via sol-gel method. The films have been processed in almost inert atmosphere so that the substrate oxidation is avoided while allowing the perovskite phase to crystallize. Polyethylene glycol (PEG) with the molecular weight of 200 was employed to modify the BST precursor solutions. The effect of PEG on the microstructure and dielectric properties of BST thin films has been investigated. Leakage current for BST thin film made from the sol with PEG modification is reported.
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