一种2ghz固有可切换平衡铁电FBAR滤波器

M. Koohi, Wenhao Peng, A. Mortazawi
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引用次数: 3

摘要

首次提出了一种本质可切换的平衡晶格梯型铁电薄膜体声谐振器(FBAR)滤波器。首先通过图像参数法设计了1.5级平衡梯形滤波器和中心频率为2ghz的2极点阵滤波器。随后,将滤波器串联起来形成阶梯晶格滤波器,并基于铁电钛酸钡锶(BST) fbar制造。测量的两段平衡滤波器提供高带外抑制和超过40 dB的off状态隔离水平,具有急剧滚降。
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An Intrinsically Switchable Balanced Ferroelectric FBAR Filter at 2 GHz
An intrinsically switchable balanced lattice-ladder ferroelectric thin film bulk acoustic resonator (FBAR) filter is presented for the first time. A 1.5 stage balanced ladder-type filter and a 2-pole lattice-type filter with a center frequency at 2 GHz are first designed through the image parameter method. Subsequently, the filters are connected in series to form a ladder-lattice filter and fabricated based on ferroelectric barium strontium titanate (BST) FBARs. The measured two-section balanced filter provides a high out-of-band rejection and OFF-state isolation levels of more than 40 dB with a sharp roll-off.
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