纳米硅薄膜的扫描隧道光刻技术

{"title":"纳米硅薄膜的扫描隧道光刻技术","authors":"P. Scheier, K. Sattler","doi":"10.1140/EPJD/E2003-00173-X","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":22391,"journal":{"name":"The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics","volume":"14 1","pages":"347-349"},"PeriodicalIF":0.0000,"publicationDate":"2003-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Scanning tunneling lithography of\\nsilicon nanoparticle films\",\"authors\":\"P. Scheier, K. Sattler\",\"doi\":\"10.1140/EPJD/E2003-00173-X\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":22391,\"journal\":{\"name\":\"The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics\",\"volume\":\"14 1\",\"pages\":\"347-349\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-07-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1140/EPJD/E2003-00173-X\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1140/EPJD/E2003-00173-X","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}