退火温度对SILAR沉积CdSe/ZnSe超晶格薄膜光电性能的影响

Elekalachi, C. I, Ezenwa, I. A., Okereke, A. N, Okoli, N. L., Nwori, A. N
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摘要

在这项工作中,利用连续离子层吸附反应(SILAR)方法在非导电玻璃衬底上制备了CdSe/ZnSe超晶格薄膜,以研究其可能的光电应用性能。通过沉积CdSe和ZnSe的交替层,SILAR过程的总循环时间为100秒,总共有12个周期。采用紫外可见光谱(UV-VIS)、扫描电子显微镜(SEM)/能谱仪(EDS)和x射线衍射技术(XRD)对所制备的薄膜进行了不同温度退火,并对其光学、元素、形态和结构性能进行了表征。表征结果表明,薄膜的吸光度、反射率、折射率和消光系数等光学性能较低,但随着退火温度的升高而增加。在373 K ~ 523 K之间退火的带隙能在130.169 nm ~ 254.441 nm之间变化,带隙能在2.50 eV ~ 1.90 eV之间变化。EDS结果表明,沉积的薄膜样品中存在Cd、Zn、Se等可溯源于衬底性质的目标元素。XRD结果表明,薄膜是多晶的,样品在523 K高温下退火后,其衍射峰受到影响。在523 K时,薄膜的晶粒尺寸、位错密度和微应变分别为5.546 nm、3.25 × 1016 l/m2和1.13 × 10-2。SEM结果表明,CdSe/ZnSe超晶格薄膜由不同尺寸和尺寸的微小纳米颗粒组成,随着退火温度从432 K增加到523 K,中空度增加。由于其带隙能量和其他特性,沉积的超晶格薄膜可能在太阳能电池和光电子器件中应用。
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Influence of Annealing Temperature on the Properties of SILAR Deposited CdSe/ZnSe Superlattice Thin Films for Optoelectronic Applications
In this work, superlattice thin films of CdSe/ZnSe were fabricated on a non-conductive glass substrate using the successive ionic layer adsorption reaction (SILAR) method to investigate their properties for possible optoelectronic applications. The SILAR process involved a total cycle time of 100 seconds for a complete SILAR cycle with a total of 12 cycles made by depositing alternative layers of CdSe and ZnSe. The deposited thin films were annealed at different temperatures and characterized to determine their optical, elemental, morphological and structural properties using UV-VIS spectroscopy, Scanning electron microscope (SEM)/energy dispersive x-ray spectroscope (EDS) and x-ray diffraction techniques (XRD). The results of the characterizations revealed that optical properties of the films such as absorbance, reflectance, refractive index and extinction coefficient are low but increased as the annealing temperature increases. The bandgap energy was found to decrease from 2.50 eV-1.90 eV for as-deposited film and those annealed between 373 K and 523 K. film thickness was found to range from 130.169 nm to 254.441 nm. The EDS results showed that the target elements such as Cd, Zn, Se and other elements traceable to the nature of substrate used were found to be present in the deposited thin film samples. The results of the XRD showed that the thin films are polycrystalline and the diffraction peaks are influenced by annealing of the sample at a higher temperature such as 523 K. The crystal parameters such as crystallite size, dislocation density and micro-strain of the film at 523 K were found to be 5.546 nm, 3.25 × 1016 l/m2 and 1.13 × 10-2. The SEM results showed that the CdSe/ZnSe superlattice films were composed of tiny nanoparticles of different dimensions and sizes with hollow which increased as the annealing temperature increased from 432 K to 523 K. Possible applications of the deposited superlattice thin films in solar cells and optoelectronic devices were established by virtue of their bandgap energy and other properties.
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