退火温度对溶胶-凝胶法制备氧化钛薄膜物理性能的影响

Sahbeni K, Sta I, Jlassi M, Kandyla M, Hajji M, Kompitsas M, Dimassi W
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引用次数: 8

摘要

本研究采用低成本的溶胶-凝胶、旋涂技术在硅衬底上生长TiO2薄膜。研究了退火温度对TiO2薄膜结构、形貌和光学性能的影响。利用拉曼光谱和傅里叶红外光谱研究了TiO2薄膜的结构特性。用原子力显微镜(AFM)研究了材料的形态特性。通过光致发光(PL)和紫外-可见(UV-vis)光谱对其光学性能进行了检测。
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Annealing Temperature Effect on the Physical Properties of Titanium Oxide Thin Films Prepared by the Sol-Gel Method
In this work, the low-cost sol–gel, spin-coating technique was used to grow TiO2 thin films on silicon substrates. The influence of annealing temperature on the structural, morphological, and optical properties of TiO2 films is investigated. The structural properties of the TiO2 films are investigated by Raman and Fourier transform infrared (FTIR) Spectroscopy. Morphological properties are studied by Atomic Force Microscopy (AFM). The optical properties are examined by photoluminescence (PL) and ultraviolet-visible (UV-vis) spectroscopy.
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