J.J. Loferski, C. Case, M. Kwietniak , P.M. Sarro , L. Castaner , R. Beaulieu
{"title":"蒸发、射频溅射和化学喷雾热解制备CuInSe2薄膜及其合金的性能比较","authors":"J.J. Loferski, C. Case, M. Kwietniak , P.M. Sarro , L. Castaner , R. Beaulieu","doi":"10.1016/0378-5963(85)90197-7","DOIUrl":null,"url":null,"abstract":"<div><p>This paper summarizes a six-year research program aimed at preparation and characterization of thin films of the chalcopyrite semiconductor CuInSe<sub>2</sub> suitable for photovoltaic solar cells and other semiconductors devices. The thin film deposition methods used were evaporation, flash evaporation, RF-sputtering and chemical spray pyrolysis. Problems with producing films of reproducible properties by these methods are discussed. Gaps in our knowledge of the dependence of the opto-electronic properties of CuInSe<sub>2</sub> crystals and films on structural defects and other imperfections are pointed out.</p></div>","PeriodicalId":100105,"journal":{"name":"Applications of Surface Science","volume":"22 ","pages":"Pages 645-655"},"PeriodicalIF":0.0000,"publicationDate":"1985-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0378-5963(85)90197-7","citationCount":"8","resultStr":"{\"title\":\"Comparison of properties of thin films of CuInSe2 and its alloys produced by evaporation, RF-sputtering and chemical spray pyrolysis\",\"authors\":\"J.J. Loferski, C. Case, M. Kwietniak , P.M. Sarro , L. Castaner , R. Beaulieu\",\"doi\":\"10.1016/0378-5963(85)90197-7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>This paper summarizes a six-year research program aimed at preparation and characterization of thin films of the chalcopyrite semiconductor CuInSe<sub>2</sub> suitable for photovoltaic solar cells and other semiconductors devices. The thin film deposition methods used were evaporation, flash evaporation, RF-sputtering and chemical spray pyrolysis. Problems with producing films of reproducible properties by these methods are discussed. Gaps in our knowledge of the dependence of the opto-electronic properties of CuInSe<sub>2</sub> crystals and films on structural defects and other imperfections are pointed out.</p></div>\",\"PeriodicalId\":100105,\"journal\":{\"name\":\"Applications of Surface Science\",\"volume\":\"22 \",\"pages\":\"Pages 645-655\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1985-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0378-5963(85)90197-7\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applications of Surface Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0378596385901977\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applications of Surface Science","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0378596385901977","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Comparison of properties of thin films of CuInSe2 and its alloys produced by evaporation, RF-sputtering and chemical spray pyrolysis
This paper summarizes a six-year research program aimed at preparation and characterization of thin films of the chalcopyrite semiconductor CuInSe2 suitable for photovoltaic solar cells and other semiconductors devices. The thin film deposition methods used were evaporation, flash evaporation, RF-sputtering and chemical spray pyrolysis. Problems with producing films of reproducible properties by these methods are discussed. Gaps in our knowledge of the dependence of the opto-electronic properties of CuInSe2 crystals and films on structural defects and other imperfections are pointed out.