金属和液体(非金属)电极之间的高频放电

Д. Н. Мирханов, Ал. Ф. Гайсин, Р. Ш. Басыров, С.Ю. Петряков
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摘要

本文研究了在大气压下金属电极和电解电极之间点燃的高频放电(f = 13.56 MHz)低温等离子体的特性。在电极之间的介质之间的界面处观察到漫射(体积)形式的射频放电燃烧。本文给出了金属电极附近蒸汽-气体混合物中击穿前焦耳热释放的电场强度和体积功率密度分布的数值计算。用发射光谱法研究了放电辐射谱、等离子体组成和电子密度。研究了射频放电条件下电极表面的热像图。
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Высокочастотный разряд между металлическим и жидким (неметаллическим) электродами
The work is devoted to the study of the characteristics of a low-temperature plasma of a high-frequency (HF) discharge (f = 13.56 MHz) ignited between metallic and electrolytic electrodes at atmospheric pressure. Burning of an RF discharge in a diffuse (volumetric) form is observed at the interface between the media between the electrodes. Numerical calculations of the electric field strength and the distribution of the volumetric power density of the Joule heat release before breakdown in a vapor-gas mixture near a metal electrode are presented. The discharge radiation spectrum, plasma composition, and electron density were studied by optical emission spectroscopy. The thermograms of the electrode surface under the conditions of an RF discharge are considered.
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