沉积速度对氧化锌纳米颗粒修饰氧化锌纳米棒阵列性能的影响

S. Saidi, M. H. Mamat, A. S. Ismail, M. Yusoff, M. F. Malek, N. Sin, A. Zoolfakar, Z. Khusaimi, M. Rusop
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引用次数: 2

摘要

研究了沉积速度对氧化锌纳米颗粒修饰的氧化锌纳米棒阵列性能的影响。在1000 ~ 3000 rpm的不同转速下沉积ZnO纳米颗粒涂层。结果表明:当沉积速度从1000转/分增加到3000转/分时,ZnO纳米棒阵列上的ZnO纳米颗粒密度降低;本研究是三维支链氧化锌纳米棒阵列湿度传感器优化生长的初步研究阶段。
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Effect of deposition speed on properties of zinc oxide nanoparticle decorated zinc oxide nanorod arrays
The study investigated the impact of deposition speed on goods of zinc oxide (ZnO) nanoparticle decorated zinc oxide nanorod arrays. The ZnO nanoparticle coatings were deposited at various speeds ranging from 1000 to 3000 rpm. The results showed that the density of ZnO nanoparticle coated on ZnO nanorod arrays was decreased when the deposition speed increased from 1000 to 3000 rpm. This study is a primary phase regarding the optimized growth of three-dimensional branched zinc oxide nanorod arrays based humidity sensor.
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