射流PCVD等离子体射流通道的射频产生

{"title":"射流PCVD等离子体射流通道的射频产生","authors":"L. Bardos, N. Vu","doi":"10.1007/BF01598451","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":11313,"journal":{"name":"Czechoslovak Journal of Physics B","volume":"1 1","pages":"731-738"},"PeriodicalIF":0.0000,"publicationDate":"1989-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"RF generation of the plasma jet channel for the jet PCVD\",\"authors\":\"L. Bardos, N. Vu\",\"doi\":\"10.1007/BF01598451\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":11313,\"journal\":{\"name\":\"Czechoslovak Journal of Physics B\",\"volume\":\"1 1\",\"pages\":\"731-738\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Czechoslovak Journal of Physics B\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/BF01598451\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Czechoslovak Journal of Physics B","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/BF01598451","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}