{"title":"用于高温应用的蓝宝石光学壁剪应力传感器的研制","authors":"D. Mills, D. Blood, M. Sheplak","doi":"10.1109/TRANSDUCERS.2015.7181168","DOIUrl":null,"url":null,"abstract":"This paper presents the development of the first sapphire micromachined wall shear stress sensor for high-temperature applications utilizing geometric moiré optical transduction. A folded tether floating element structure is employed to extend the linear operating range of the sensor. Picosecond pulsed laser micro-machining processes are developed for patterning of mechanical structures in sapphire, and a four-channel alumina fiber array with sapphire optical fibers is used to interrogate the moiré fringe. Platinum thin-film gratings and a stainless steel package enable a theoretical maximum operating temperature in excess of 800°C, and initial dynamic calibration in differential mode demonstrates a shear stress sensitivity of 76.8 μV/Pa at 1.128 kHz.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"139 1","pages":"1295-1298"},"PeriodicalIF":0.0000,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Development of a sapphire optical wall shear stress sensor for high-temperature applications\",\"authors\":\"D. Mills, D. Blood, M. Sheplak\",\"doi\":\"10.1109/TRANSDUCERS.2015.7181168\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the development of the first sapphire micromachined wall shear stress sensor for high-temperature applications utilizing geometric moiré optical transduction. A folded tether floating element structure is employed to extend the linear operating range of the sensor. Picosecond pulsed laser micro-machining processes are developed for patterning of mechanical structures in sapphire, and a four-channel alumina fiber array with sapphire optical fibers is used to interrogate the moiré fringe. Platinum thin-film gratings and a stainless steel package enable a theoretical maximum operating temperature in excess of 800°C, and initial dynamic calibration in differential mode demonstrates a shear stress sensitivity of 76.8 μV/Pa at 1.128 kHz.\",\"PeriodicalId\":6465,\"journal\":{\"name\":\"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)\",\"volume\":\"139 1\",\"pages\":\"1295-1298\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2015.7181168\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2015.7181168","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Development of a sapphire optical wall shear stress sensor for high-temperature applications
This paper presents the development of the first sapphire micromachined wall shear stress sensor for high-temperature applications utilizing geometric moiré optical transduction. A folded tether floating element structure is employed to extend the linear operating range of the sensor. Picosecond pulsed laser micro-machining processes are developed for patterning of mechanical structures in sapphire, and a four-channel alumina fiber array with sapphire optical fibers is used to interrogate the moiré fringe. Platinum thin-film gratings and a stainless steel package enable a theoretical maximum operating temperature in excess of 800°C, and initial dynamic calibration in differential mode demonstrates a shear stress sensitivity of 76.8 μV/Pa at 1.128 kHz.