基于压电翻译器的高性能陶瓷原位扫描电镜弯曲装置的研制

H. Frei, G. Grathwohl
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引用次数: 13

摘要

介绍了一种用于高强度陶瓷的四点弯管机。其紧凑的设计使其能够被整合到商业生产的SEM的机械阶段,而不需要外部机械馈线。通过电子控制的压电位移传感器可以进行静态、动态和循环弯曲操作。利用石英晶体换能器同时进行扫描电镜观察和力测量。采用先进的陶瓷材料取得了典型的结果,如载荷-位移曲线和裂纹扩展路径的观察。
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Development of a piezotranslator-based bending device for in situ SEM investigations of high-performance ceramics
A four-point bender for high-strength ceramics is described. Its compact design allows it to be incorporated into the mechanical stage of a commercially produced SEM, without the need for external mechanical feedthroughs. Static, dynamic and cyclic bending operations can be carried out by means of an electronically controlled piezoelectric displacement transducer. Simultaneous SEM observation and force measurement by means of a quartz crystal transducers are also provided. Typical results achieved with advanced ceramics as load-displacement curves and observations of the crack propagation paths are included.
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