电弧等离子体高性能ZnO导电薄膜的设计

Journal of The Vacuum Society of Japan Pub Date : 2017-08-01 DOI:10.3131/JVSJ2.60.292

Tetsuya Yamamoto, J. Nomoto, H. Kitami, T. Sakemi, H. Makino, Keisuke L. I. Kobayashi, Y. Aoki, S. Kishimoto

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引用次数: 4

摘要

设计先进的功能氧化锌与电弧等离子体导电薄膜Tetsuya山本1,野本Junichi1,Hisashi KITAMI1,2,Toshiyuki SAKEMI2,众所周知牧野1,小林圭佑1,靖青木2和岸本Seiichi31研究所,科钦科技大学185 Miyanokuchi Tosayamada-cho, Kami-shi,科钦782年至8502年,日本2技术研究中心,住友重工业有限公司19 Natsushima-cho Yokosuka-shi,神奈川2378555,日本3高知县工业大学机械工程系，2001高知县南国市大津部，7838508

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Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma

Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma Tetsuya YAMAMOTO1, Junichi NOMOTO1, Hisashi KITAMI1,2, Toshiyuki SAKEMI2, Hisao MAKINO1, Keisuke KOBAYASHI1, Yasushi AOKI2 and Seiichi KISHIMOTO3 1Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami-shi, Kochi 7828502, Japan 2Technology Research Center, Sumitomo Heavy Industries Ltd., 19 Natsushima-cho, Yokosuka-shi, Kanagawa 2378555, Japan 3Department of Mechanical Engineering, Kochi National College of Technology, 2001 Otsu Monobe, Nankoku-shi, Kochi 7838508, Japan

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Journal of The Vacuum Society of Japan

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