N. Akiyama, Masayoshi Serizawa, F. Mizuno, M. Ikota, K. Takami, Seigo Ema
{"title":"空间滤镜机上打印系统的研制","authors":"N. Akiyama, Masayoshi Serizawa, F. Mizuno, M. Ikota, K. Takami, Seigo Ema","doi":"10.2493/JJSPE.59.1114","DOIUrl":null,"url":null,"abstract":"An on-machine printing system for a spatial filter has been developed to detect small particles on the memory-mat of a 0.3 μm LSI. A minicopy film is used for the base of spatial filters. A pattern on the filter is printed by a thermal head using a ribbon painted with ink of synthetic resin. The maximum size of the printed spatial filter is 16 × 16 mm. The transmission factors of printed and transparent parts are 0.92% and 92% respectively. The printing time is 5 seconds. The signal obtained at memory-mat decreases to 4% using this spatial filter and 0.6 μm standard particles are detected at an SN ratio of 3.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"10 1","pages":"1114-1120"},"PeriodicalIF":0.0000,"publicationDate":"1993-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Development of on-machine printing system for spatial filter\",\"authors\":\"N. Akiyama, Masayoshi Serizawa, F. Mizuno, M. Ikota, K. Takami, Seigo Ema\",\"doi\":\"10.2493/JJSPE.59.1114\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An on-machine printing system for a spatial filter has been developed to detect small particles on the memory-mat of a 0.3 μm LSI. A minicopy film is used for the base of spatial filters. A pattern on the filter is printed by a thermal head using a ribbon painted with ink of synthetic resin. The maximum size of the printed spatial filter is 16 × 16 mm. The transmission factors of printed and transparent parts are 0.92% and 92% respectively. The printing time is 5 seconds. The signal obtained at memory-mat decreases to 4% using this spatial filter and 0.6 μm standard particles are detected at an SN ratio of 3.\",\"PeriodicalId\":14336,\"journal\":{\"name\":\"International Journal of The Japan Society for Precision Engineering\",\"volume\":\"10 1\",\"pages\":\"1114-1120\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1993-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of The Japan Society for Precision Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2493/JJSPE.59.1114\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of The Japan Society for Precision Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2493/JJSPE.59.1114","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Development of on-machine printing system for spatial filter
An on-machine printing system for a spatial filter has been developed to detect small particles on the memory-mat of a 0.3 μm LSI. A minicopy film is used for the base of spatial filters. A pattern on the filter is printed by a thermal head using a ribbon painted with ink of synthetic resin. The maximum size of the printed spatial filter is 16 × 16 mm. The transmission factors of printed and transparent parts are 0.92% and 92% respectively. The printing time is 5 seconds. The signal obtained at memory-mat decreases to 4% using this spatial filter and 0.6 μm standard particles are detected at an SN ratio of 3.
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