O. Millet, P. Muller, O. Blanrue, B. Legrand, D. Collard, L. Buchaillot
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Reliability of non-released microstructures: failure analysis and innovative solution process
The paper deals with the investigation of microstructure failures due to storage between two steps of the fabrication process, and with the presentation of an innovative process avoiding these failures. Applications in fabrication process, corrective processes on released structures and reverse engineering are thanks to nanoindentation on mobile parts.
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