P. Marinushkin, A. Levitsky, Fyodor Zograf, V. A. Bakhtina
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On the Finite-Element Analysis of Resonance MEMS Structures based on Acoustic Lamb Waves
This paper considers issues of modeling ultra-high frequency MEMS resonators based on acoustic Lamb waves. In addition, the analysis of factors that determine whether it is possible to increase resonators working frequency and quality factor is carried out. Influence of resonator excitation scheme and acoustic waveguide thickness for a range of piezoelectric materials (i.e. AlN, ZnO, GaN) on phase velocity for acoustic Lamb wave zero modes is investigated. As a result, we've got estimations determining dependence of resonators electromechanical coupling coefficient on their geometry.
期刊介绍：
Informacije MIDEM publishes original research papers in the fields of microelectronics, electronic components and materials. Review papers are published upon invitation only. Scientific novelty and potential interest for a wider spectrum of readers is desired. Authors are encouraged to provide as much detail as possible for others to be able to replicate their results. Therefore, there is no page limit, provided that the text is concise and comprehensive, and any data that does not fit within a classical manuscript can be added as supplementary material.
Topics of interest include:
Microelectronics,
Semiconductor devices,
Nanotechnology,
Electronic circuits and devices,
Electronic sensors and actuators,
Microelectromechanical systems (MEMS),
Medical electronics,
Bioelectronics,
Power electronics,
Embedded system electronics,
System control electronics,
Signal processing,
Microwave and millimetre-wave techniques,
Wireless and optical communications,
Antenna technology,
Optoelectronics,
Photovoltaics,
Ceramic materials for electronic devices,
Thick and thin film materials for electronic devices.
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