{"title":"常压线性微波等离子体材料表面处理","authors":"H. Shindo, H. Kuwahata, M. Isomura","doi":"10.3131/JVSJ2.60.105","DOIUrl":null,"url":null,"abstract":"Atmospheric pressure plasma is a powerful tool for various material processing. In this article, development of atmospheric pressure plasmas are reviewed, particularly for glow-like plasma which is characterized by spreading in space and has an advantage applicable to surface treatment. One important issue in application of atmospheric pressure plasma is a large area processing, and as one candidate for the purpose, line-shaped microwave plasma in atmospheric pressure is also reviewed.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"124 1","pages":"105-111"},"PeriodicalIF":0.0000,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Atmospheric Pressure Linear Microwave Plasma for Surface Treatment of Materials\",\"authors\":\"H. Shindo, H. Kuwahata, M. Isomura\",\"doi\":\"10.3131/JVSJ2.60.105\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Atmospheric pressure plasma is a powerful tool for various material processing. In this article, development of atmospheric pressure plasmas are reviewed, particularly for glow-like plasma which is characterized by spreading in space and has an advantage applicable to surface treatment. One important issue in application of atmospheric pressure plasma is a large area processing, and as one candidate for the purpose, line-shaped microwave plasma in atmospheric pressure is also reviewed.\",\"PeriodicalId\":17344,\"journal\":{\"name\":\"Journal of The Vacuum Society of Japan\",\"volume\":\"124 1\",\"pages\":\"105-111\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of The Vacuum Society of Japan\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3131/JVSJ2.60.105\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Vacuum Society of Japan","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3131/JVSJ2.60.105","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Atmospheric Pressure Linear Microwave Plasma for Surface Treatment of Materials
Atmospheric pressure plasma is a powerful tool for various material processing. In this article, development of atmospheric pressure plasmas are reviewed, particularly for glow-like plasma which is characterized by spreading in space and has an advantage applicable to surface treatment. One important issue in application of atmospheric pressure plasma is a large area processing, and as one candidate for the purpose, line-shaped microwave plasma in atmospheric pressure is also reviewed.
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