等离子体处理纳米球光刻(NSL)固定在纳米颗粒形成处的氨基酸紫外光谱

F. Mohamad, M. Agam, Hadi Nur
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引用次数: 0

摘要

纳米球光刻技术作为一种高分辨率、高性价比的光刻技术,受到了业界和学术界的广泛关注。它利用单分散纳米球的自组织作为一种逆模式,其沉积通道由纳米球之间的间隙空隙定义。这种沉积通道的大小与球体的大小成正比。在本研究中,通过等离子体处理纳米球结构,对纳米球光刻(NSL)技术制备的纳米粒子阵列进行修饰,制备出不同尺寸、形状和取向的周期粒子阵列(PPAs)。研究了固定在纳米颗粒阵列上的蛋白质的紫外光谱。
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UV spectra of amino acid in immobilized at nanoparticles formation through Nanosphere Lithography (NSL) by plasma treatment
Nanosphere lithography, as one of the high-resolution and cost-effective technologies, has attracted much research effort from both industry and academics [1]. It utilizes the self-organization of monodispersed nanospheres as an inverse pattern whose deposition channels are defined by interstitial voids between nanospheres [1]. The size of such deposition channels in the pattern is proportional to the size of the spheres. In this study, the modifying of nanospheres structures by plasma treatments to the fabricated nanoparticles arrays by Nanosphere Lithography (NSL) techniques to create Periodic Particles arrays (PPAs) with different size, shape and orientation. UV spectra of protein that immobilized to the nanoparticles arrays under UV spectrums were studied.
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