结合软光刻和喷墨打印技术实现磁致可变光衰减器

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474300

S. de Pedro, V. Cadarso, X. Muñoz‐Berbel, J. Plaza, J. Sort, J. Brugger, S. Buttgenbach, A. Llobera

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引用次数: 4

摘要

本文报道了以聚二甲基硅氧烷(PDMS)为组成材料，采用软光刻技术(SLT)实现磁性可变光衰减器(M-VOA)。采用并比较了两种不同的制作方案。在第一种情况下，通过SLT制备了两层结构，其中包含磁性PDMS (M-PDMS)层上的清洁PDMS层。M-PDMS是通过掺杂不同铁磁流体(FF)量的纯净PDMS得到的。第二种方案包括通过喷墨打印技术(IPT)在先前由SLT定义的清洁且未固化的PDMS结构上选择性地分配FF液滴。比较了两种方法制备的结构和含有相似铁磁流体量的结构的光学和力学性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies

This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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