超薄膜演变的实时分析

Yi-Wen Chen, Jian-Hua Gu, Zu-Hong Lu
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引用次数: 0

摘要

提出并开发了薄膜参数实时演化与分析系统。其原理是基于表面等离子体共振。用该系统得到了空气中银膜的分离结果。
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Real-time analysis of ultrathin films’ evolution

The system of real-time evolution and analysis of films’ parameters has been suggested and developed. Its principle is based on surface plasmon resonance. The results of Ag film left in air have been obtained by this system.

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