气等离子体法沉积涂层装置中基材冷却系统的建模

IF 0.5 Q4 PHYSICS, NUCLEAR Problems of Atomic Science and Technology Pub Date : 2023-06-09 DOI:10.46813/2023-145-072

S. Martynov, O.A. Luchaninov, V. Lukyanova, S. Prokhorets, O. O. Slabospytska, M. Khazhmuradov

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引用次数: 0

摘要

金刚石涂层的合成效率既取决于等离子体流的参数，也取决于合成涂层的衬底表面的均匀温度分布。对气相等离子体法沉积涂层装置中的基底冷却系统进行了数学建模，以寻找在金刚石涂层合成过程中，同时在基底上实现高密度、径向均匀的能量流和化学活性粒子流的最佳参数。利用SolidWorks软件包中的FlowSimulation模块，采用直接搜索的方法求解。

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MODELING OF THE SUBSTRATE COOLING SYSTEM IN THE INSTALLATION FOR THE DEPOSITION OF COATINGS BY THE GAS PLASMA METHOD

The efficiency of diamond coating synthesis depends on both the parameters of the plasma flow and the uniform temperature distribution on the surface of the substrate on which the coating is synthesized. Mathematical modeling of the substrate cooling system in the installation for the deposition of coatings by the gas plasma method was carried out in order to find optimal parameters at which high density and radial uniformity of energy and chemically active particle flows are simultaneously achieved on the substrate in the process of synthesis of diamond coatings. The task was solved by direct search methods using the FlowSimulation module of the SolidWorks package.

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来源期刊

Problems of Atomic Science and Technology 物理-核科学技术

CiteScore

0.70

自引率

50.00%

发文量

审稿时长

2-4 weeks

期刊介绍： The journal covers the following topics: Physics of Radiation Effects and Radiation Materials Science; Nuclear Physics Investigations; Plasma Physics; Vacuum, Pure Materials and Superconductors; Plasma Electronics and New Methods of Acceleration.