{"title":"扫描速度波动对激光扫描尺寸测量精度的影响","authors":"Jiang Tao, Yu Zheng-lin, Cao Guohua, X. Hongji","doi":"10.1109/CLEOPR.2009.5292682","DOIUrl":null,"url":null,"abstract":"This paper analyzes details the effect of scanning speed fluctuation to the precision of size measurement by laser scanning and proposes two on-line compensation methods. They have been proved to be applicable and feasible.","PeriodicalId":6452,"journal":{"name":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2009-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"The effect of scanning speed fluctuation to the precision of size measurement by laser scanning\",\"authors\":\"Jiang Tao, Yu Zheng-lin, Cao Guohua, X. Hongji\",\"doi\":\"10.1109/CLEOPR.2009.5292682\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper analyzes details the effect of scanning speed fluctuation to the precision of size measurement by laser scanning and proposes two on-line compensation methods. They have been proved to be applicable and feasible.\",\"PeriodicalId\":6452,\"journal\":{\"name\":\"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOPR.2009.5292682\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOPR.2009.5292682","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The effect of scanning speed fluctuation to the precision of size measurement by laser scanning
This paper analyzes details the effect of scanning speed fluctuation to the precision of size measurement by laser scanning and proposes two on-line compensation methods. They have been proved to be applicable and feasible.