扫描速度波动对激光扫描尺寸测量精度的影响

2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics Pub Date : 2009-10-30 DOI:10.1109/CLEOPR.2009.5292682

Jiang Tao, Yu Zheng-lin, Cao Guohua, X. Hongji

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引用次数: 1

摘要

详细分析了扫描速度波动对激光扫描尺寸测量精度的影响，提出了两种在线补偿方法。实践证明，这些方法是适用的、可行的。

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The effect of scanning speed fluctuation to the precision of size measurement by laser scanning

This paper analyzes details the effect of scanning speed fluctuation to the precision of size measurement by laser scanning and proposes two on-line compensation methods. They have been proved to be applicable and feasible.

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2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics

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