{"title":"热水驱动的层叠式Knudsen泵的试制;热水驱动的层叠式Knudsen泵的试制;Fabrication of Stackable Knudsen Pump Driven by Hot Water","authors":"Shota Tamura, H. Sugimoto","doi":"10.3131/JVSJ2.60.481","DOIUrl":null,"url":null,"abstract":"A stackable Knudsen pump consisting of multistage pump units driven by temperature diŠerence between hot and cold water is fabricated. Each unit has a porous membrane of 64 cm2 area, through which thermal transpiration ‰ow, the driving force of the Knudsen pump, is induced at atmospheric ambient pressure. This study demonstrates the present device facilitates the cascade or parallel connection of multiple pump units to improve performance. For example, a Knudsen pump consisting of 6cascaded units provides a shut-oŠ pressure of 9.2 kPa and a 300 sccm maximum ‰ow rate at the temperature diŠerence of 45 K. The feasibility of the pumping system driven by low-grade waste heats is also demonstrated.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"温水駆動による積層式Knudsenポンプの試作;温水駆動による積層式Knudsenポンプの試作;Fabrication of Stackable Knudsen Pump Driven by Hot Water\",\"authors\":\"Shota Tamura, H. Sugimoto\",\"doi\":\"10.3131/JVSJ2.60.481\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A stackable Knudsen pump consisting of multistage pump units driven by temperature diŠerence between hot and cold water is fabricated. Each unit has a porous membrane of 64 cm2 area, through which thermal transpiration ‰ow, the driving force of the Knudsen pump, is induced at atmospheric ambient pressure. This study demonstrates the present device facilitates the cascade or parallel connection of multiple pump units to improve performance. For example, a Knudsen pump consisting of 6cascaded units provides a shut-oŠ pressure of 9.2 kPa and a 300 sccm maximum ‰ow rate at the temperature diŠerence of 45 K. The feasibility of the pumping system driven by low-grade waste heats is also demonstrated.\",\"PeriodicalId\":17344,\"journal\":{\"name\":\"Journal of The Vacuum Society of Japan\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of The Vacuum Society of Japan\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3131/JVSJ2.60.481\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Vacuum Society of Japan","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3131/JVSJ2.60.481","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
温水駆動による積層式Knudsenポンプの試作;温水駆動による積層式Knudsenポンプの試作;Fabrication of Stackable Knudsen Pump Driven by Hot Water
A stackable Knudsen pump consisting of multistage pump units driven by temperature diŠerence between hot and cold water is fabricated. Each unit has a porous membrane of 64 cm2 area, through which thermal transpiration ‰ow, the driving force of the Knudsen pump, is induced at atmospheric ambient pressure. This study demonstrates the present device facilitates the cascade or parallel connection of multiple pump units to improve performance. For example, a Knudsen pump consisting of 6cascaded units provides a shut-oŠ pressure of 9.2 kPa and a 300 sccm maximum ‰ow rate at the temperature diŠerence of 45 K. The feasibility of the pumping system driven by low-grade waste heats is also demonstrated.
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