含离子膦酸基团的射频等离子体聚合物:单体结构和载气对性能和沉积速率的影响

{"title":"含离子膦酸基团的射频等离子体聚合物:单体结构和载气对性能和沉积速率的影响","authors":"M. J. Danilich, R. Marchant","doi":"10.1023/A:1016291319032","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":20249,"journal":{"name":"Plasmas and Polymers","volume":"15 1","pages":"127-149"},"PeriodicalIF":0.0000,"publicationDate":"2002-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Radiofrequency Plasma Polymers Containing Ionic Phosphonate Groups: Effect of Monomer Structure and Carrier Gas on Properties and Deposition Rate\",\"authors\":\"M. J. Danilich, R. Marchant\",\"doi\":\"10.1023/A:1016291319032\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":20249,\"journal\":{\"name\":\"Plasmas and Polymers\",\"volume\":\"15 1\",\"pages\":\"127-149\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Plasmas and Polymers\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1023/A:1016291319032\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas and Polymers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1023/A:1016291319032","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}