氮分压对反应直流磁控溅射制备ZrNx薄膜结构、力学性能和腐蚀行为的影响

4区 工程技术 Q3 Physics and Astronomy Scanning Pub Date : 2023-01-01 DOI:10.1155/2023/3604077
Daoxuan Liang, Wei Dai
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引用次数: 2

摘要

采用直流磁控溅射技术,在不同的氮气分压环境下(r = N2/[Ar + N2])制备了纯Zr靶材ZrNx薄膜。利用扫描电镜、掠射角x射线衍射和x射线光电子能谱对薄膜的结构和组成进行了表征。在3.5 wt% NaCl溶液中,采用纳米压痕法、微划痕法和动电位法测定了涂层的硬度、粘接强度和腐蚀性能。结果表明:当r从12%增加到50%时,ZrNx膜的结构由典型柱状结构的接近化学计量的ZrN转变为由ZrN和α-ZrNx组成的致密玻璃结构的混合相;由于非化学计量化合物和玻璃相结构的存在,涂层的硬度、弹性模量和附着力等力学性能随r的增加而降低,而致密的玻璃相结构显著提高了涂层的缓蚀性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrNx Films Prepared by Reactive DC Magnetron Sputtering.

ZrNx films were deposited by DC magnetron sputtering with pure Zr target in different nitrogen partial pressure atmospheres (r = N2/[Ar + N2]). The structure and composition of the thin films were characterized as a function of r using scanning electron microscope, glancing angle X-ray diffraction, and X-ray photoelectron spectroscopy. The hardness, adhesive strength, and corrosion behavior of the coatings were measured by nanoindentation, microscratch, and potentiodynamic measurements in 3.5 wt% NaCl solution. The results show that the structure of the ZrNx films changes from a nearly stoichiometric ZrN with a typical columnar structure to mixed phases composited of ZrN and α-ZrNx with a dense glass structure as r increases from 12% to 50%. The mechanical properties including hardness, elastic modulus, and adhesion decrease with increasing r due to nonstoichiometric compound and glass phase structure of the coatings, while the dense glass structure significantly improves the corrosion inhibition.

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来源期刊
Scanning
Scanning 工程技术-显微镜技术
CiteScore
4.40
自引率
0.00%
发文量
111
审稿时长
6-12 weeks
期刊介绍: Scanning provides an international and interdisciplinary medium for the rapid exchange of information among all scientists interested in scanning electron, scanning probe, and scanning optical microscopies. Areas of specific interest include all aspects of the instrumentation associated with scanning microscopies, correlative microscopy techniques, stereometry, stereology, analytic techniques, and novel applications of the microscopies.
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