Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Tunable and scalable fabrication of plasmonic dimer arrays with sub-10 nm nanogaps by area-selective atomic layer deposition

Pub Date : 2021-08-30 DOI: 10.1116/6.0001205 Chengwu Zhang, Tuo Gao, Donal Sheets, J. Hancock, J. Tresback, B. Willis

Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies

Pub Date : 2021-08-25 DOI: 10.1116/6.0001160 Pavani Vamsi Krishna Nittala, Karthika Haridas, Shivam Nigam, Saba Tasneem, P. Sen

Ultradeep microaxicons in lithium niobate by focused Xe ion beam milling

Pub Date : 2021-08-24 DOI: 10.1116/6.0001232 S. Gorelick, A. Marco