Technology for Fundamental Improvement of an Extremely Low-Quality Video Signal for Use in Fine Focusing and Astigmatism Correction in Scanning Electron Microscopy.

4区 工程技术 Q3 Physics and Astronomy Scanning Pub Date : 2023-01-01 DOI:10.1155/2023/7305255
Eisaku Oho, Sadao Yamazaki, Kazuhiko Suzuki
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Abstract

This study describes important techniques for production of a series of video signals for use in fine focusing operations and near-perfect astigmatism correction in the general-purpose scanning electron microscopy (SEM) field. These techniques can enhance the stability of the signal greatly when used for focusing. As two particularly important fundamental techniques, SEM image acquisition with priority given to the signal-to-noise ratio and signal reinforcement based on the active image processing concept were utilized fully. The performance improvement was evaluated using the case of a previously reported support system for fine focusing and astigmatism correction based on image covariance. The method is almost completely robust against noise within practical limits and allows for focusing and astigmatism correction for even extremely noisy SEM images. The results of this study may be useful not only in the SEM field but also in many fields that use weak signals.

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用于扫描电子显微镜精细聚焦和像散校正的极低质量视频信号的根本改进技术。
本研究描述了在通用扫描电子显微镜(SEM)领域中用于精细聚焦操作和近乎完美的散光校正的一系列视频信号的重要技术。当用于聚焦时,这些技术可以大大提高信号的稳定性。以信噪比为主的扫描电镜图像采集和基于主动图像处理理念的信号增强技术作为两项特别重要的基础技术得到了充分的利用。使用先前报道的基于图像协方差的精细聚焦和像散校正支持系统对性能改进进行了评估。该方法在实际限制范围内几乎完全抗噪声,并允许对焦和散光校正,即使是非常嘈杂的SEM图像。本研究结果不仅适用于扫描电镜领域,而且适用于许多使用弱信号的领域。
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来源期刊
Scanning
Scanning 工程技术-显微镜技术
CiteScore
4.40
自引率
0.00%
发文量
111
审稿时长
6-12 weeks
期刊介绍: Scanning provides an international and interdisciplinary medium for the rapid exchange of information among all scientists interested in scanning electron, scanning probe, and scanning optical microscopies. Areas of specific interest include all aspects of the instrumentation associated with scanning microscopies, correlative microscopy techniques, stereometry, stereology, analytic techniques, and novel applications of the microscopies.
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