Parametric Analysis of Indium Gallium Arsenide Wafer-based Thin Body (5 nm) Double-gate MOSFETs for Hybrid RF Applications.

IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Recent Patents on Nanotechnology Pub Date : 2024-01-01 DOI:10.2174/1872210517666230602095347
Pattunnarajam Paramasivam, Naveenbalaji Gowthaman, Viranjay M Srivastava
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Abstract

Introduction: The electrical behavior of a high-performance Indium Gallium Arsenide (In- GaAs) wafer-based n-type Double-Gate (DG) MOSFET with a gate length (LG1= LG2) of 2 nm was analyzed. The relationship of channel length, gate length, top and bottom gate oxide layer thickness, a gate oxide material, and the rectangular wafer with upgraded structural characteristics and the parameters, such as switch current ratio (ION/IOFF) and transconductance (Gm) was analyzed for hybrid RF applications.

Methods: This work was carried out at 300 K utilizing a Non-Equilibrium Green Function (NEGF) mechanism for the proposed DG MOSFET architecture with La2O3 (EOT=1 nm) as gate dielectric oxide and source-drain device length (LSD) of 45 nm. It resulted in a maximum drain current (IDmax) of 4.52 mA, where the drain-source voltage (VDS) varied between 0 V and 0.5 V at the fixed gate to source voltage (VGS) = 0.5 V. The ON current(ION), leakage current (IOFF), and (ION/IOFF) switching current ratios of 1.56 mA, 8.49×10-6 μA, and 18.3×107 μA were obtained when the gate to source voltage (VGS) varied between 0 and 0.5 V at fixed drain-source voltage (VDS)=0.5V.

Results: The simulated result showed the values of maximum current density (Jmax), one and twodimensional electron density (N1D and N2D), electron mobility (μn), transconductance (Gm), and Subthreshold Slope (SS) are 52.4 μA/m2, 3.6×107 cm-1, 11.36×1012 cm-2, 1417 cm2V-1S-1, 3140 μS/μm, and 178 mV/dec, respectively. The Fermi-Dirac statistics were employed to limit the charge distribution of holes and electrons at a semiconductor-insulator interface. The flat-band voltage (VFB) of - 0.45 V for the fixed threshold voltage greatly impacted the breakdown voltage. The results were obtained by applying carriers to the channels with the (001) axis perpendicular to the gate oxide. The sub-band energy profile and electron density were well implemented and derived using the Non-Equilibrium Green's Function (NEGF) formalism. Further, a few advantages of the proposed heterostructure-based DG MOSFET structure over the other structures were observed.

Conclusion: This proposed patent design, with a reduction in the leakage current characteristics, is mainly suitable for advanced Silicon-based solid-state CMOS devices, Microelectronics, Nanotechnologies, and future-generation device applications.

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用于混合射频应用的基于砷化镓铟晶片的薄体(5 nm)双栅 MOSFET 的参数分析。
简介:分析了栅极长度(LG1= LG2)为 2 nm、基于砷化镓铟(In- GaAs)晶片的高性能 n 型双栅 MOSFET 的电气行为。针对混合射频应用,分析了沟道长度、栅极长度、顶部和底部栅极氧化层厚度、栅极氧化物材料以及矩形晶片的升级结构特征与开关电流比 (ION/IOFF) 和跨导 (Gm) 等参数之间的关系:这项工作是在 300 K 温度条件下,利用非平衡绿色函数 (NEGF) 机制,针对以 La2O3(EOT=1 nm)为栅极电介质氧化物、源极-漏极器件长度(LSD)为 45 nm 的拟议 DG MOSFET 架构进行的。在栅源电压 (VGS) = 0.5 V 的固定条件下,漏源电压 (VDS) 在 0 V 和 0.5 V 之间变化,最大漏极电流 (IDmax) 为 4.52 mA。当栅至源电压(VGS)在 0 至 0.5 V 之间变化,漏极至源电压(VDS)= 0.5 V 时,导通电流(ION)、漏电流(IOFF)和(ION/IOFF)开关电流比分别为 1.56 mA、8.49×10-6 μA 和 18.3×107 μA:模拟结果显示,最大电流密度(Jmax)、一维和二维电子密度(N1D 和 N2D)、电子迁移率(μn)、跨导(Gm)和阈下斜率(SS)的值分别为 52.4 μA/m2、3.6×107 cm-1、11.36×1012 cm-2、1417 cm2V-1S-1、3140 μS/μm 和 178 mV/dec。利用费米-狄拉克统计来限制半导体-绝缘体界面上空穴和电子的电荷分布。固定阈值电压为 - 0.45 V 的平带电压 (VFB) 对击穿电压有很大影响。这些结果是通过在垂直于栅极氧化物的 (001) 轴上向沟道施加载流子而获得的。利用非平衡格林函数 (NEGF) 公式,很好地实现和推导了子带能量曲线和电子密度。此外,与其他结构相比,所提出的基于异质结构的 DG MOSFET 结构还具有一些优势:结论:这一专利设计降低了漏电流特性,主要适用于先进的硅基固态 CMOS 器件、微电子学、纳米技术和未来一代器件应用。
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来源期刊
Recent Patents on Nanotechnology
Recent Patents on Nanotechnology NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
4.70
自引率
10.00%
发文量
50
审稿时长
3 months
期刊介绍: Recent Patents on Nanotechnology publishes full-length/mini reviews and research articles that reflect or deal with studies in relation to a patent, application of reported patents in a study, discussion of comparison of results regarding application of a given patent, etc., and also guest edited thematic issues on recent patents in the field of nanotechnology. A selection of important and recent patents on nanotechnology is also included in the journal. The journal is essential reading for all researchers involved in nanotechnology.
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