Subaperture Interferometric Testing of Aspheric Optics

Rick A. Williams, O. Kwon
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Abstract

Aspheric optical surfaces fill the need to generate non-standard wavefront profiles in many modern optical systems. Interferometric tests have been developed to measure the extreme phase errors, relative to a spherical reference, which occur near the outer regions of the aperture. Several null compensation techniques have been described. For example, a null lens designed to generate an aspheric reference wavefront can be used to negate the effect of the surface figure resulting in measurement of deviations from the desired asphere. Alternatively, computer generated holograms have been used in two-beam interferometers such that the wavefront from the aspheric test surface is compared to a "perfect" wavefront generated by the hologram. A second class of techniques based on shearing interferometry have also been described. For example, a lateral shear interferometer, in which two displaced wavefronts from the same test surface are interfered, does not require compensating optics or a reference surface to measure aspheric figure errors.
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非球面光学的子孔径干涉检测
在许多现代光学系统中,非球面光学表面填补了产生非标准波前轮廓的需要。干涉测试已经发展到测量极端相位误差,相对于一个球形参考,这发生在孔径的外部区域附近。已经描述了几种零补偿技术。例如,设计用于产生非球面参考波前的零透镜可用于消除导致测量偏离所需非球面的表面图形的影响。另外,计算机生成的全息图已用于双光束干涉仪,这样来自非球面测试面的波前与由全息图生成的“完美”波前进行比较。第二类基于剪切干涉测量的技术也被描述。例如,横向剪切干涉仪,其中来自同一测试表面的两个位移波前被干涉,不需要补偿光学元件或参考表面来测量非球面图形误差。
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