Challenges in Developing a Family of MEMS Accelerometers for High-g-Navigation Applications

J. Cole, A. Cunningham, Jerry Sweet, Pete Hulbert
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Abstract

In this paper we show feasibility of miniature, high-g MEMS capacitive accelerometers with full-scale ranges of 400 to 10,000g and that are capable of measuring high-g navigation events.
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为高重力导航应用开发一系列MEMS加速度计的挑战
在本文中,我们展示了微型高g MEMS电容加速度计的可行性,其满量程为400至10,000g,并且能够测量高g导航事件。
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