{"title":"Development of Minimal RF-magnetron Sputtering Machine","authors":"S. Fujii, Yuki Odo, H. Nishizato","doi":"10.12792/iciae2023.014","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":212391,"journal":{"name":"The Proceedings of The 11th IIAE International Conference on Industrial Application Engineering 2023","volume":"38 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Proceedings of The 11th IIAE International Conference on Industrial Application Engineering 2023","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.12792/iciae2023.014","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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