Research on the Flexible Three-Dimensional Force Sensor Based on Microstructure

Yuyun Xu, Xuehua Dong, H. Pan, F. Shuang
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Abstract

A flexible three-dimensional force sensor based on microstructures is proposed. The structure design and fabrication of the sensor are introduced. The principle of the three-dimensional force detection is expounded. The mathematical model of the force on the sensor is established. The tactile sensing mechanism is analyzed by finite element analysis. A data acquisition system is built to calibrate and verify the sensor. The BP neural network is used to decouple the sensor. The results show that the sensor is simple and flexible in structure and can realize the three-dimensional force detection.
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基于微结构的柔性三维力传感器研究
提出了一种基于微结构的柔性三维力传感器。介绍了传感器的结构设计和制作方法。阐述了三维力检测的原理。建立了作用在传感器上的力的数学模型。采用有限元分析方法对触觉传感机理进行了分析。建立了一个数据采集系统来校准和验证传感器。采用BP神经网络对传感器进行解耦。结果表明,该传感器结构简单、灵活,可实现三维力检测。
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