Hanyan Li, Jun Cai, Yinghua Du, Xinghui Li, Jinjun Feng
{"title":"UV-LIGA microfabrication for high frequency structures of a Y-band TWT 2nd harmonic amplifier","authors":"Hanyan Li, Jun Cai, Yinghua Du, Xinghui Li, Jinjun Feng","doi":"10.1109/IVEC.2015.7223881","DOIUrl":null,"url":null,"abstract":"In this paper, we fabricate copper high frequency structures for a Y-band(170-220GHz) TWT 2nd harmonic amplifier using UV LIGA technology. The two halves have been bonded and assembled in the amplifier. The measurement results of the amplifier show that over 100mW harmonic output power with most of the 11.4GHz of bandwidth at 1% duty cycle have been achieved, and the maximum harmonic output power reaches 500mW.","PeriodicalId":435469,"journal":{"name":"2015 IEEE International Vacuum Electronics Conference (IVEC)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE International Vacuum Electronics Conference (IVEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVEC.2015.7223881","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
In this paper, we fabricate copper high frequency structures for a Y-band(170-220GHz) TWT 2nd harmonic amplifier using UV LIGA technology. The two halves have been bonded and assembled in the amplifier. The measurement results of the amplifier show that over 100mW harmonic output power with most of the 11.4GHz of bandwidth at 1% duty cycle have been achieved, and the maximum harmonic output power reaches 500mW.