LSI Gigabit Logic In Silicon (An Alternative to GaAs)

Damien Wheat, N. F. Gardner
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Abstract

Advances in military communications are making ever-increasing demands on integrated circuit technology. Many military communication systems require data rates in the gigahertz range. Usually gallium arsenide technology is chosen for these high-speed applications. However, for device counts in excess of 1000 transistors, the defect level is prohibitively high in gallium arsenide circuits. For these applications, High-speed bipolar silicon technology is an excellent if not the only choice available. This paper presents a design and process for a silicon LSI circuit that is capable of data rates in excess of 1.8 Gigahertz and a divide by 2 circuit that operates at 3.9 Gigahertz. The LSI chip consists of a common building block, used in military communication systems, replicated 16 times, to demonstrate both yield and speed. The wafer fabrication process is the Radiation-Hard, Oxide-Walled, Self-Aligned Emitter (ROSE) process.
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硅基LSI千兆逻辑(GaAs的替代方案)
军事通信的发展对集成电路技术提出了越来越高的要求。许多军事通信系统需要千兆赫范围内的数据速率。通常选择砷化镓技术用于这些高速应用。然而,对于超过1000个晶体管的器件,砷化镓电路的缺陷水平高得令人望而却步。对于这些应用,高速双极硅技术即使不是唯一的选择,也是一个很好的选择。本文介绍了一种数据速率超过1.8千兆赫兹的硅LSI电路的设计和工艺,以及工作在3.9千兆赫兹的除以2电路。这种大规模集成电路芯片由一个用于军事通信系统的普通构建块组成,复制了16次,以展示产量和速度。晶圆制造工艺是抗辐射,氧化壁,自对准发射极(ROSE)工艺。
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