SIMS study of Na in CIGS and impurities in CdTe/CdS

Larry Wang, A. Wang, R. Hockett
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Abstract

Impurities can adversely affect wafer yields and solar cell performance. Secondary Ion Mass Spectrometry (SIMS) is a very effective technique to quantitatively measure the elemental impurity concentrations in CIGS and CdTe based thin film solar cells. Na in CIGS: Na is an important composition element in CIGS based solar cells. SIMS depth profiles can provide the Na concentration distribution throughout the CIGS layer. The variation of compositions in different layers in CIGS presents a challenge for SIMS to accurately quantify Na concentrations, because SIMS quantification relies on reference materials with compositions that match the compositions of the different layers. In this study, we will present SIMS results of Na in CIGS films with different compositions, and solutions that can provide accurate Na quantification (within +−15%) of CIGS samples with unknown compositions. Impurities in CdTe/CdS: SIMS quantification at the CdTe/CdS interface and thin CdS layer is difficult due to change of materials. In this study, we will present solutions for accurate quantifications in CdTe/CdS.
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CIGS中Na和CdTe/CdS中杂质的SIMS研究
杂质会对晶圆产量和太阳能电池性能产生不利影响。二次离子质谱法(SIMS)是一种非常有效的定量测量CIGS和CdTe薄膜太阳能电池中元素杂质浓度的技术。CIGS中的Na: Na是CIGS基太阳能电池的重要组成元素。SIMS深度剖面可以提供整个CIGS层的Na浓度分布。CIGS中不同层成分的变化给SIMS准确定量Na浓度带来了挑战,因为SIMS的定量依赖于与不同层成分相匹配的标准物质。在本研究中,我们将展示不同成分的CIGS薄膜中Na的SIMS结果,以及可以对未知成分的CIGS样品提供准确的Na定量(在+ - 15%以内)的溶液。CdTe/CdS中的杂质:由于材料的变化,CdTe/CdS界面和薄cd层的SIMS难以量化。在本研究中,我们将提出CdTe/CdS精确定量的解决方案。
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