Feasibility of lead-free piezoceramic based power ultrasonic transducers

Andrew Mathieson, D. DeAngelis
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引用次数: 4

Abstract

Lead-based piezoceramics are currently the most widely used transduction material in power ultrasonic applications. Directives such as the Restriction of Hazardous Substances (RoHS and RoHS2) regulate the sale of electrical and electronic equipment containing hazardous substances, such as lead, entering the European marketplace. However, lead-based piezoceramics have been exempt due to the lack of a genuine lead-free equivalent. Lead-free piezoceramics were first developed in the 1950s, however their relatively poor properties when compared to PZT left them largely neglected until the implementation of the European directive. This study investigates the incorporation of a modern lead-free piezoceramic, a variant of bismuth sodium titanate (BNT), into a commercial power ultrasonic transducer used in semiconductor wire bonding. It is reported that a device containing BNT was capable of forming wire bonds, and that the lead-free transducer exhibited properties that could make them suitable in other power ultrasonic applications.
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无铅压电陶瓷功率超声换能器的可行性
铅基压电陶瓷是目前应用最广泛的功率超声换能器材料。诸如有害物质限制(RoHS和RoHS2)之类的指令规范了含有有害物质(如铅)的电气和电子设备进入欧洲市场的销售。然而,由于缺乏真正的无铅等效产品,铅基压电陶瓷已被豁免。无铅压电陶瓷最早是在20世纪50年代开发的,但是与PZT相比,它们相对较差的性能使它们在很大程度上被忽视,直到欧洲指令的实施。本研究探讨了将一种新型无铅压电陶瓷,一种铋钛酸钠(BNT)的变体,整合到用于半导体线键合的商用功率超声换能器中。据报道,含有BNT的装置能够形成导线键,并且无铅换能器显示出可以使其适用于其他功率超声波应用的特性。
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