Machine Vision System for Measuring Subsurface Damage

J. Greivenkamp, Matthew T. Chang
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引用次数: 1

Abstract

The dimpling technique is widely used to measure subsurface damage SSD. The ground surface is first acid etched to open up the fractures. A dimple is polished into the surface by a sphere of a known diameter, and the diameters of the circular zones with and without visible subsurface fractures are measured to determined the damage depth. The measuring system consists of a microscope with a reticule and a linear translation stage. The diameters of the various zones are visually interpreted and measured. The dimpling technique provides a direct measurement of SSD, as opposed to other techniques where the SSD is implied from other properties such as scattering. The manual measurements associated with this technique are tedious and requires a trained operator to identify the deepest fracture.
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测量亚表面损伤的机器视觉系统
微窝技术被广泛应用于固态硬盘的亚表面损伤测量。地面首先被酸蚀以打开裂缝。用已知直径的球体在表面上打磨出一个凹窝,测量有或没有可见地下裂缝的圆形区域的直径,以确定损伤深度。该测量系统由带分光镜的显微镜和线性平移台组成。不同区域的直径可以直观地解释和测量。酒窝技术提供了对SSD的直接测量,而其他技术则通过散射等其他属性来暗示SSD。与该技术相关的人工测量非常繁琐,需要训练有素的操作人员来识别最深的裂缝。
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Defocus Measurement Using A Liquid Crystal Point Diffraction Interferometer Aberration Measurement Using Axial Intensity Polished Substrate Surface and Cleaning Study for Coated Optic Quality* Zerodur Polishing Process for High Surface Quality and High Efficiency* Surface Evaluation Techniques for the Optics of the Future
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