High photon flux and repetition rate table-top EUV sources based on ultrashort pulse fiber lasers

S. Hadrich, J. Rothhardt, M. Krebs, S. Demmler, J. Limpert, A. Tunnermann
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引用次数: 2

Abstract

Using high average power fiber lasers as drivers for high harmonic generation has evolved into a promising concept for achieving unprecedented high photon flux. Recent achievements will be discussed and underlined by first applications.
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基于超短脉冲光纤激光器的高光子通量和重复率台式极紫外光源
利用高平均功率光纤激光器作为高谐波产生的驱动器已经发展成为一个有前途的概念,以实现前所未有的高光子通量。最近的成就将讨论并强调首次申请。
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