{"title":"Stress sensing based on one dimensional photonic crystal nano beam","authors":"F. Hsiao, Zhen-Hong Yang","doi":"10.1109/ISSNIP.2014.6827615","DOIUrl":null,"url":null,"abstract":"We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si<sub>3</sub>N<sub>4</sub> layer is deposited above the waveguide. The thermal stress between Si/Si<sub>3</sub>N<sub>4</sub> induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.","PeriodicalId":269784,"journal":{"name":"2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2014-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSNIP.2014.6827615","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si3N4 layer is deposited above the waveguide. The thermal stress between Si/Si3N4 induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.
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