Polymeric strain gauges as pressure sensors for microfabricated organ-on-chips

Abstract

Polymeric (PEDOT:PSS) strain gauges embedded in PDMS membranes fabricated using a full wafer-scale fabrication process capable of realizing reproducible small features, are reported. The devices are characterized using a customized setup, which provides mechanical stretch while dynamically reading the electrical resistance. Measurements show relative resistance changes of approximately 11% for applied pressure up to 4 kPa. The process described is tailored to fabricate pressure sensors and microelectrodes for a flexible substrate-based Organ-on-Chip platform.