Deconvolution-based spatial resolution improvement technique for resistivity scans acquired with split-post dielectric resonator

P. Korpas
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引用次数: 5

Abstract

Resistivity scans of inhomogeneous samples obtained with the technique based on Split-Post Dielectric Resonator suffer from limited spatial resolution due to weighted averaging of the complex permittivity distribution over the sample's volume. A deconvolution-based technique is proposed to increase the resolution of scans as well as to enable measurement of homogeneous samples which do not meet the minimal dimensions criterion for the given resonator.
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分柱介质谐振器电阻率扫描的反卷积空间分辨率改进技术
基于分柱介电谐振器技术的非均匀样品电阻率扫描由于对样品体积上的复介电常数分布进行加权平均,导致空间分辨率有限。提出了一种基于反卷积的技术,以提高扫描的分辨率,并使测量均匀样品不满足最小尺寸标准的给定谐振器。
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