Design and fabrication of Interdigitated Electrode (IDE) for detection of Ganoderma boninense

Abstract

As a present work, a capacitive electrochemical biosensor i.e. Interdigitated Elecrode (IDE) was successfully designed and fabricated with aluminium as its contact pad deposited on a semi-conductor (silicon) surface using a thermal evaporator. For the fabrication method, lift-off photolithography process is applied followed by morphological and electrical characterizations. Meanwhile, the design of the IDE mask was done by the aid of AutoCAD software with miniaturization for future work of Ganoderma boninense detection. The electrical performance of the microelectrode sensor proved to be remarkable and for further studies, surface modification need to be done for sensing of biomolecules especially the target DNA Ganoderma. This study has proven that with the simple process of photolithography, IDEs can be fabricated within few hours and with low cost.