Terahertz Devices with EMXT Structure Fabricated by MEMS

Shengjie Yang, Hongda Lu, Zhipeng Liu, Y. Liu, Bin Li, X. Lv
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Abstract

Due to the micro-dimension of terahertz devices and antennas, it requires more stringent processing technology. Micro-Electro-Mechanical Systems (MEMS) used to fabricate terahertz functional devices and antennas is a good choice for the high accuracy, good consistence and low cost. In this paper, one approach to obtain antennas and passive devices in terahertz band is proposed, which based on electromagnetic crystal structure and MEMS technology. The band-pass filter, 90° bend waveguide and H-plane horn antenna operating at terahertz band are presented as examples. All of them have good agreement between simulation and measurement.
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MEMS制造的EMXT结构太赫兹器件
由于太赫兹器件和天线的微观尺寸,它需要更严格的加工技术。采用微机电系统(MEMS)制造太赫兹功能器件和天线具有精度高、一致性好、成本低等优点。本文提出了一种基于电磁晶体结构和MEMS技术的太赫兹频段天线和无源器件的实现方法。以工作在太赫兹波段的带通滤波器、90°弯曲波导和h面喇叭天线为例。仿真结果与实测结果吻合较好。
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