{"title":"Improvement of uniformities of thickness and incident angles of particles by swinging rotation motion on reactive sputtering deposition","authors":"M. Akiba","doi":"10.1364/OIC.2019.WD.4","DOIUrl":null,"url":null,"abstract":"On reactive magnetron sputtering, we developed swinging rotation motion. It improves uniformities of thickness and incident angles of particles. The uniformities and the area size are easily adjustable with the range of the swinging motion.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.WD.4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
On reactive magnetron sputtering, we developed swinging rotation motion. It improves uniformities of thickness and incident angles of particles. The uniformities and the area size are easily adjustable with the range of the swinging motion.
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