Omer Lavy, L. Gal, Danny Weicherman, S. Stolyarova, E. David, A. Saad, Y. Nemirovsky
{"title":"MEMS tunable capacitor with wide tuning range using multiple voltage sources","authors":"Omer Lavy, L. Gal, Danny Weicherman, S. Stolyarova, E. David, A. Saad, Y. Nemirovsky","doi":"10.1109/COMCAS.2009.5386045","DOIUrl":null,"url":null,"abstract":"This paper presents a MEMS surface micro-machined varactor. The dynamic range of this class of varactors is governed by pull-in instability which is ideally one-third of the initial gap between the two electrodes. This paper presents a simple T varactor, whose pull-in stability and hence its dynamic range are increased by applying two independent voltage sources. We introduce an electromechanical model for the proposed structure, and a full analytic solution to the attached pull in problem. Our varactor has capacitance ratio of 2.43:1.","PeriodicalId":372928,"journal":{"name":"2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMCAS.2009.5386045","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents a MEMS surface micro-machined varactor. The dynamic range of this class of varactors is governed by pull-in instability which is ideally one-third of the initial gap between the two electrodes. This paper presents a simple T varactor, whose pull-in stability and hence its dynamic range are increased by applying two independent voltage sources. We introduce an electromechanical model for the proposed structure, and a full analytic solution to the attached pull in problem. Our varactor has capacitance ratio of 2.43:1.
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