{"title":"Application of Lagrangian configuration to the analysis of electrostatically-driven MEMS resonators","authors":"L. Arapan, B. Dulmet","doi":"10.1109/EFTF.2014.7331490","DOIUrl":null,"url":null,"abstract":"This paper proposes an example of application of Lagrange configuration to the modelling of the electrostatically- driven vibrations of a silicon bar in flexure modes. Mapping an acousto-elastic problem onto the material coordinates of a well-known reference configuration is appropriate to analyze problems in finite deformation and is an excellent tool to model electrostatically-driven MEMS resonators. The paper presents an application of this approach to the analysis of a flexural resonator.","PeriodicalId":129873,"journal":{"name":"2014 European Frequency and Time Forum (EFTF)","volume":"151 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 European Frequency and Time Forum (EFTF)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EFTF.2014.7331490","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
This paper proposes an example of application of Lagrange configuration to the modelling of the electrostatically- driven vibrations of a silicon bar in flexure modes. Mapping an acousto-elastic problem onto the material coordinates of a well-known reference configuration is appropriate to analyze problems in finite deformation and is an excellent tool to model electrostatically-driven MEMS resonators. The paper presents an application of this approach to the analysis of a flexural resonator.
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