Spectroscopic Investigation of Argon DC Glow Discharge in Plasma Medium

Esra Okumuş
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Abstract

In this study, UV-VIS-NIR (Ultraviolet Visible Near-Infrared) spectra emitted from Argon Glow discharge plasma in a low vacuum were recorded with a high-resolution Czerny-Turner type spectrometer. Argon plasma was produced at a pressure of 5mTorr and with a voltage of 584 V. Argon plasma was produced between two parallel stainless steel plates anode and cathode with a diameter of 15 cm, a thickness of 0.8 cm, and a distance of 13 cm between them. The radiative and collisional processes of the Argon plasma medium were modeled by the PrismSPECT atomic physics software (Software). The distributions of ion densities were calculated using the Saha-Boltzmann equation. The intensity of the excited energy levels of Ar(I) and Ar (II) ions were calculated in the electron temperature range of (0.4-3.5eV) and the mass density of (10-4-10-1gr/cm3). The UV-Visible-NIR spectra were simulated and compared with experimental spectra. The ratios of the intensities of the ArII/ArI (1s22s22p63s23p44f1/1s22s22p63s23p54p1) spectral lines were obtained for different plasma temperatures and densities. The temperature of the argon plasma was obtained from the spectral line intensity ratios.
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等离子体介质中氩气直流辉光放电的光谱研究
本研究利用高分辨率的切尔尼-特纳光谱仪记录了氩辉光放电等离子体在低真空条件下发射的紫外-可见-近红外光谱。在5mTorr的压力和584 V的电压下产生氩等离子体。在阳极和阴极两个平行的不锈钢板之间产生氩等离子体,阳极和阴极直径为15 cm,厚度为0.8 cm,间距为13 cm。利用PrismSPECT原子物理软件(software)对氩等离子体介质的辐射和碰撞过程进行了模拟。利用Saha-Boltzmann方程计算离子密度分布。计算了Ar(I)和Ar(II)离子在电子温度(0.4 ~ 3.5 ev)和质量密度(10-4-10-1gr/cm3)范围内的激发能级强度。模拟了紫外-可见-近红外光谱,并与实验光谱进行了比较。得到了不同等离子体温度和密度下ArII/ArI (1s22s22p63s23p44f1/1s22s22p63s23p54p1)谱线的强度比。氩等离子体的温度由谱线强度比得到。
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