Emission Spectrochemical Analysis Using the Plasma Induced by the Bombardment of XeCl Excimer Laser Pulse

Abstract

It has been proved that by employing a XeCl excimer laser with output pulse energy of 80 mJ, the minimum determinal concentration can be reduced down to about 1/10 as compared with the case for the N2 laser. In this connection, it has been found out that when the laser plasma is confined in a small region by increasing the pressure of the surrounding gas, the dependence of the emission intensity on the element content deviates slightly from the linear relationship and shows a tendency of saturation because of the occurrence of selfabsorption due to the high density of the plasma.