{"title":"Roughness Evolution and Light Scattering Simulation in Multilayer Coatings Deposited with Plasma Ion-Assistance","authors":"D. Tonova, S. Bruynooghe, D. Isfort","doi":"10.1364/OIC.2019.TE.3","DOIUrl":null,"url":null,"abstract":"The roughness evolution of Nb2O5 and SiO2 thin films and multilayers, deposited with low energy Plasma Ion-Assistance, is investigated and modelled. The models are used to predict the light scattering of a longwave pass filter.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.TE.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The roughness evolution of Nb2O5 and SiO2 thin films and multilayers, deposited with low energy Plasma Ion-Assistance, is investigated and modelled. The models are used to predict the light scattering of a longwave pass filter.
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