{"title":"ULTRASONIC SURFACE WAVES FOR STUDYING THE PROPERTIES OF THIN FILMS","authors":"R. Küchler","doi":"10.1002/PSSA.2211320229","DOIUrl":null,"url":null,"abstract":"The change of the spreading velocity of ultrasonic surface waves by thin film deposition is described by an approximation of the nonlinear equations of motion. The effect of residual stress in deposited films on the spreading velocity is considered. As an example for practical applications, the velocity change of surface waves after TiN film deposition on steel bars is investigated.","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/PSSA.2211320229","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 16
Abstract
The change of the spreading velocity of ultrasonic surface waves by thin film deposition is described by an approximation of the nonlinear equations of motion. The effect of residual stress in deposited films on the spreading velocity is considered. As an example for practical applications, the velocity change of surface waves after TiN film deposition on steel bars is investigated.
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